Evaporate with precision
We design, supply and install Thin Film Evaporation systems and components
E-gun evaporation
E-beam evaporation systems are of vital importance for the semiconductor industry. They
allow you to deposit various materials layer by layer on substrates, which is essential for the
production of modern electronics. With the industry’s stringent quality standards and
performance requirements, the reliability and precision of e-gun evaporation systems are of
utmost importance.
Choosing Vactec as your supplier of E beam evaporation systems offers numerous benefits.
Vactec systems are known for their reliability and durability, designed to operate
continuously, ensuring uninterrupted production. Additionally, Vactec guarantees a high level
of repeated uniformity in multiple layers, resulting in superior product quality. Our systems
are highly versatile and capable of processing a wide range of materials.
Furthermore, each system is supplied, installed, and maintained by experienced
Vactec experts, ensuring seamless operation and minimal downtime. With Vactec as your partner,
you can be assured of technical excellence and industry-leading performance in the semiconductor industry.
Product types
FC2000 PVD Tool
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FC2800 PVD Tool
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FC3800 PVD Tool
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Temescal HV Powersupplies
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FC2000 PVD Tool
The FC2000 is a fully automated electronbeam PVD evaporation system evaporation of nearly all materials used for both high end R&D and production environments
The FC2000 PVD system provides:
- Full integrated and automated deposition system, including datalogging of deposition parameters, development of deposition recipes and automated control of all functionality of pumps, valves, guns, ionsource, sample heating, cooling, etc.
- Excellent access of the e-gun through swingout electronbeam gun chamber
- Reliable highvacuum pumpingsystem with cryopump and compressor
- Extreme fast pumpdown through loadlocked sampleholder chamber
- Excellent uniformity by Rotary sample holder and >50cm Source to Substrate distance
- Virtual no cross-contamination between materials by unique turretgun design
- Reliable and powerfull High Voltage powersupply, 6, 12 or 15kW.
Technical Specifications:
- 500 mm hinged loadlock belljar
- ultimate vacuum < 5E-8 mbar
- 550 mm Source-to-Substrate distance
- Temescal STIH270-2 poptop egun, with 6kW high voltage powersupply
- Dry backingpump 40 m3/hr
- Cryopump 1500 l/sec
- PLC control with touchscreen
- Inficon deposition controller
FC2800 PVD Tool
FC3800 PVD Tool
Temescal HV Powersupplies
We work with
